Ultrathin initiated chemical vapor deposition polymer interfacial energy control for directed self-assembly hole-shrink applications

Published in Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2019

Recommended citation: Dolejsi, M., Moni, P., Bezik, C. T., Zhou, C., de Pablo, J. J., Gleason, K. K., & Nealey, P. F. (2019). Ultrathin initiated chemical vapor deposition polymer interfacial energy control for directed self-assembly hole-shrink applications. Journal of Vacuum Science & Technology B, 37(6), 061804. https://doi.org/10.1116/1.5121541 http://cbezik.github.io/codybezik.github.io/files/dolejsi.pdf

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My contributions to this paper were using Monte Carlo simulations of block copolymer self-assembly to find defect structures that correlated well with the ones observed experimentally, highlighting the validity of the 3D imaging technique used by the experimentalists.

Recommended citation: Dolejsi, M., Moni, P., Bezik, C. T., Zhou, C., de Pablo, J. J., Gleason, K. K., & Nealey, P. F. (2019). Ultrathin initiated chemical vapor deposition polymer interfacial energy control for directed self-assembly hole-shrink applications. Journal of Vacuum Science & Technology B, 37(6), 061804. https://doi.org/10.1116/1.5121541