Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions

Published in Emerging Patterning Technologies 2018, 2018

Recommended citation: Zhou, C., Kurosawa, T., Dazai, T., Doise, J., Ren, J., Bezik, C., … Nealey, P. F. (2018). Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions. In E. M. Panning & M. I. Sanchez (Eds.), Emerging Patterning Technologies 2018 (p. 19). SPIE. https://doi.org/10.1117/12.2297461 http://cbezik.github.io/codybezik.github.io/files/zhou.pdf

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My contributions to this paper include simulations of block copolymer directed self-assembly in the "hole-shrink" process, demonstrating that our coarse-grained simulations predict the same morphologies observed through direct imaging of 3D structures from experiments.

Recommended citation: Zhou, C., Kurosawa, T., Dazai, T., Doise, J., Ren, J., Bezik, C., … Nealey, P. F. (2018). Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions. In E. M. Panning & M. I. Sanchez (Eds.), Emerging Patterning Technologies 2018 (p. 19). SPIE. https://doi.org/10.1117/12.2297461